发明授权
- 专利标题: Detection sensor, vibrator
- 专利标题(中): 检测传感器,振动器
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申请号: US12555221申请日: 2009-09-08
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公开(公告)号: US08336367B2公开(公告)日: 2012-12-25
- 发明人: Jian Lu , Tsuyoshi Ikehara , Takashi Mihara
- 申请人: Jian Lu , Tsuyoshi Ikehara , Takashi Mihara
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: National Institute of Advanced Industrial Science and Technology,Olympus Corporation
- 当前专利权人: National Institute of Advanced Industrial Science and Technology,Olympus Corporation
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2007-068570 20070316; JP2007-304936 20071126
- 主分类号: G01N29/02
- IPC分类号: G01N29/02
摘要:
An object of the present invention is to provide a detection sensor and a vibrator which can offer improved sensitivity. The present invention uses a scheme in which no piezoelectric layer, drive electrode, or the like is provided on the surface of a vibrator 30 and in which the vibrator 30 is driven by an actuator 40 provided separately from the vibrator 30. The actuator 40 is of a cantilever type and is provided near a fixed end 30a of the vibrator 30. Vibration of the actuator 40 is transmitted to the vibrator 30 via a coupling beam 70. Thus, vibration of the vibrator 30 is prevented from being inhibited by a piezoelectric layer, a drive electrode, or the like. This improves the Q value of the vibrator 30 and thus the sensitivity of the detection sensor 10. Furthermore, if the detection sensor 10 is configured to offer a sensitivity equivalent to that of a conventional one, the size of the detection sensor 10 can be sharply reduced compared to that of the conventional one.
公开/授权文献
- US20100107736A1 DETECTION SENSOR, VIBRATOR 公开/授权日:2010-05-06
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