发明授权
- 专利标题： Metal sulfide thin film and method for production thereof
- 专利标题（中）： 金属硫化物薄膜及其制造方法
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申请号： US10525443申请日： 2003-08-27
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公开(公告)号： US08337952B2公开(公告)日： 2012-12-25
- 发明人: Tadashi Takahashi , Naoyuki Takahashi , Takato Nakamura
- 申请人： Tadashi Takahashi , Naoyuki Takahashi , Takato Nakamura
- 申请人地址： JP
- 专利权人： Suzuki Motor Corporation
- 当前专利权人： Suzuki Motor Corporation
- 当前专利权人地址： JP
- 代理机构： Myers Bigel Sibley & Sajovec, P.A.
- 优先权： JP2002-252450 20020830
- 国际申请： PCT/JP03/10814 WO 20030827
- 国际公布： WO2004/020688 WO 20040311
- 主分类号： C23C16/08
- IPC分类号： C23C16/08
摘要：
An object of the present invention is to provide a single-phase film of a metal sulfide with good quality, and a method for preparing a metal sulfide film at a low cost in a convenient manner. The present invention provides a preparation method of a metal sulfide film, comprising the steps of providing metal halide, such as iron halide (FeCl3, FeI3, FeBr3, FeCl2, FeI2 and FeBr2), as a first raw material and a thioamide compound, such as thioacetamide, as a second raw material, preferably vaporizing these raw materials and reacting them at atmospheric pressure; and a metal sulfide film prepared by this method.
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