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US08344381B2 Flat display panel, UV sensor and fabrication method thereof 有权
平板显示面板,UV传感器及其制造方法

Flat display panel, UV sensor and fabrication method thereof
Abstract:
A UV sensor comprises a silicon-rich dielectric layer with a refractive index in a range of about 1.7 to about 2.5 for serving as the light sensing material of the UV sensor. The fabrication method of the UV sensor can be integrated with the fabrication process of semiconductor devices or flat display panels.
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