Invention Grant
- Patent Title: Vertical-type semiconductor device
- Patent Title (中): 垂直型半导体器件
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Application No.: US12872270Application Date: 2010-08-31
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Publication No.: US08344385B2Publication Date: 2013-01-01
- Inventor: Young-Hoo Kim , Hyo-San Lee , Sang-Won Bae , Bo-Un Yoon , Kun-Tack Lee
- Applicant: Young-Hoo Kim , Hyo-San Lee , Sang-Won Bae , Bo-Un Yoon , Kun-Tack Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2009-0092258 20090929
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/792

Abstract:
In a vertical-type non-volatile memory device, an insulation layer pattern is provided on a substrate, the insulation layer pattern having a linear shape. Single-crystalline semiconductor patterns are provided on the substrate to make contact with both sidewalls of the insulation layer pattern, the single-crystalline semiconductor patterns having a pillar shape that extends in a vertical direction relative to the substrate. A tunnel oxide layer is provided on the single-crystalline semiconductor pattern. A lower electrode layer pattern is provided on the tunnel oxide layer and on the substrate. A plurality of insulation interlayer patterns is provided on the lower electrode layer pattern, the insulation interlayer patterns being spaced apart from one another by a predetermined distance along the single-crystalline semiconductor pattern. A charge-trapping layer and a blocking dielectric layer are sequentially formed on the tunnel oxide layer between the insulation interlayer patterns. A plurality of control gate patterns is provided on the blocking dielectric layer between the insulation interlayer patterns. An upper electrode layer pattern is provided on the tunnel oxide layer and on the uppermost insulation interlayer pattern.
Public/Granted literature
- US20110073866A1 VERTICAL-TYPE SEMICONDUCTOR DEVICE Public/Granted day:2011-03-31
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