Invention Grant
- Patent Title: Method of detecting a movement of a measuring probe and measuring instrument
- Patent Title (中): 检测测量头和测量仪器运动的方法
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Application No.: US12461810Application Date: 2009-08-25
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Publication No.: US08345260B2Publication Date: 2013-01-01
- Inventor: Hartmut Illers , Kazuhiko Hidaka , Akinori Saito , Hans Ullrich Danzebrink
- Applicant: Hartmut Illers , Kazuhiko Hidaka , Akinori Saito , Hans Ullrich Danzebrink
- Applicant Address: JP Kawasaki DE Braunschweig
- Assignee: Mitutoyo Corporation,Bundesrepublik Deutschland, Endvertreten Durch den Prasidenten der Physikalisch-Technischen Bundesan
- Current Assignee: Mitutoyo Corporation,Bundesrepublik Deutschland, Endvertreten Durch den Prasidenten der Physikalisch-Technischen Bundesan
- Current Assignee Address: JP Kawasaki DE Braunschweig
- Agency: Oliff & Berridge, PLC
- Priority: EP08016297 20080916
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A method of detecting a movement of a measuring probe provided between an objective lens adapted to image an object plane on a predetermined image plane and the object plane is disclosed. Additionally, a measuring instrument comprising an objective lens and a measuring probe is disclosed. An input beam of light is split into a measurement beam and a reference beam. The measurement beam is focused on a reverse focal plane of the objective lens such that the measurement beam is collimated by the objective lens. The collimated measurement beam is reflected at the measuring probe. The reflected measurement beam is directed towards the objective lens such that the objective lens focuses the reflected measurement beam on the reverse focal plane. The reflected measurement beam is collimated. The collimated reference beam and the reference beam are superimposed to form a superimposed beam and an interference between the reflected measurement beam and the reference beam is detected.
Public/Granted literature
- US20100067021A1 Method of detecting a movement of a measuring probe and measuring instrument Public/Granted day:2010-03-18
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