Invention Grant
US08346497B2 Method for testing semiconductor film, semiconductor device and manufacturing method thereof 有权
半导体膜测试方法,半导体器件及其制造方法

Method for testing semiconductor film, semiconductor device and manufacturing method thereof
Abstract:
The invention provides a method for testing a semiconductor film, a manufacturing method of a semiconductor film, a laser crystallization method, a laser crystallization device, and a laser crystallization system, for testing a laser crystallized semiconductor film, which require less time, have sufficient reliability, are excellent in cost management and applicable to mass production. In the method for testing a semiconductor film having an improved crystallinity by irradiating an energy light, the tested semiconductor film is photographed in a dark field digital image and then the luminance of the digital image is calculated by a computer in a constant direction for testing.
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