Invention Grant
- Patent Title: Method for fabricating a carrier with a three dimensional inductor
- Patent Title (中): 用三维电感器制造载体的方法
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Application No.: US13173022Application Date: 2011-06-30
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Publication No.: US08347490B1Publication Date: 2013-01-08
- Inventor: Chih-Ming Kuo , You-Ming Hsu
- Applicant: Chih-Ming Kuo , You-Ming Hsu
- Applicant Address: TW Hsinchu
- Assignee: Chipbond Technology Corporation
- Current Assignee: Chipbond Technology Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Jackson IPG PLLC
- Main IPC: H01F7/06
- IPC: H01F7/06

Abstract:
A method for fabricating a carrier with a three-dimensional inductor comprises the steps of providing a substrate having a protective layer; forming a first photoresist layer on the protective layer; patterning the first photoresist layer to form a second opening and a plurality of disposing slots; forming a first metal layer in second opening and disposing slots; removing the first photoresist layer; forming a first dielectric layer on the protective layer; forming a second photoresist layer on the first dielectric layer; patterning the second photoresist layer to form a plurality of slots; forming a second metal layer in slots to form a plurality of inductive portions; removing the second photoresist layer; forming a second dielectric layer on the first dielectric layer; forming a third photoresist layer on the second dielectric layer; patterning the third photoresist layer to form a plurality of slots; and forming a third metal layer in slots.
Public/Granted literature
- US20130002387A1 METHOD FOR FABRICATING A CARRIER WITH A THREE DIMENSIONAL INDUCTOR AND STRUCTURE THEREOF Public/Granted day:2013-01-03
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