Invention Grant
- Patent Title: Acceleration sensor
- Patent Title (中): 加速度传感器
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Application No.: US12783307Application Date: 2010-05-19
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Publication No.: US08347721B2Publication Date: 2013-01-08
- Inventor: Jochen Reinmuth
- Applicant: Jochen Reinmuth
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009026462 20090526
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/00

Abstract:
A micromechanical acceleration sensor includes a substrate with a substrate surface arranged in one plane, a first counter-electrode arranged on the substrate surface, a second counter-electrode arranged on the substrate surface, and a rocking mass arranged above the first counter-electrode and the second counter-electrode. The rocking mass is in this case connected to the substrate via a torsion spring which permits tilting of the rocking mass about an axis of rotation. Further provided are a first compensation counter-electrode arranged on the substrate surface and a second compensation counter-electrode arranged on the substrate surface. In addition, a first compensation electrode is arranged above the first compensation counter-electrode and a second compensation electrode is arranged above the second compensation counter-electrode.
Public/Granted literature
- US20100300204A1 ACCELERATION SENSOR Public/Granted day:2010-12-02
Information query
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