Invention Grant
- Patent Title: Polishing liquid and polishing method
- Patent Title (中): 抛光液和抛光方法
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Application No.: US13074046Application Date: 2011-03-29
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Publication No.: US08349042B2Publication Date: 2013-01-08
- Inventor: Katsuaki Miyatani
- Applicant: Katsuaki Miyatani
- Applicant Address: JP Tokyo
- Assignee: Asahi Glass Company, Limited
- Current Assignee: Asahi Glass Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-256322 20081001
- Main IPC: B24D3/02
- IPC: B24D3/02 ; C09C1/68 ; C09K3/14

Abstract:
The present invention relates to a polishing slurry including: a colloidal silica having an average particle size of 40 nm or more; water; and a ζ potential adjusting component, in which the ζ potential adjusting component includes at least one water-soluble organic polymer selected from a water-soluble polyether polyamine and a water-soluble polyalkylene polyamine and at least one acid selected from hydrochloric acid, sulfuric acid, nitric acid, nitrous acid and amidosulfuric acid, and the ζ potential adjusting component contains the acid at a ratio of from 0.6 to 1.4 to the water-soluble organic polymer in terms of molar ratio, and the polishing slurry has a pH of 8 or more.
Public/Granted literature
- US20110175018A1 POLISHING LIQUID AND POLISHING METHOD Public/Granted day:2011-07-21
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