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US08349147B2 Method for forming photocatalytic apatite film 有权
形成光催化磷灰石膜的方法

Method for forming photocatalytic apatite film
Abstract:
A method for forming a photocatalytic apatite includes a target production step (S12) for producing a sputtering target that contains photocatalytic apatite, and a sputtering step (S13) for forming a photocatalytic apatite film on a substrate by sputtering using the target. A firing step (S11) for firing the photocatalytic apatite is conducted before the sputtering step so as to increase the crystallinity of the photocatalytic apatite.
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