Invention Grant
- Patent Title: Method for forming photocatalytic apatite film
- Patent Title (中): 形成光催化磷灰石膜的方法
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Application No.: US11141030Application Date: 2005-06-01
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Publication No.: US08349147B2Publication Date: 2013-01-08
- Inventor: Noriyasu Aso , Masato Wakamura
- Applicant: Noriyasu Aso , Masato Wakamura
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Fujitsu Patent Center
- Main IPC: B22F1/00
- IPC: B22F1/00 ; B22F9/00 ; C21B15/04 ; C22B5/20 ; C22C1/04 ; C23C14/00 ; C23C14/32

Abstract:
A method for forming a photocatalytic apatite includes a target production step (S12) for producing a sputtering target that contains photocatalytic apatite, and a sputtering step (S13) for forming a photocatalytic apatite film on a substrate by sputtering using the target. A firing step (S11) for firing the photocatalytic apatite is conducted before the sputtering step so as to increase the crystallinity of the photocatalytic apatite.
Public/Granted literature
- US20050230241A1 Method for forming photocatalytic apatite film Public/Granted day:2005-10-20
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