Invention Grant
US08349203B2 Method of forming self-assembled patterns using block copolymers, and articles thereof
有权
使用嵌段共聚物形成自组装图案的方法及其制品
- Patent Title: Method of forming self-assembled patterns using block copolymers, and articles thereof
- Patent Title (中): 使用嵌段共聚物形成自组装图案的方法及其制品
-
Application No.: US12554175Application Date: 2009-09-04
-
Publication No.: US08349203B2Publication Date: 2013-01-08
- Inventor: Ho-Cheol Kim , Sang-min Park , Charles T. Rettner
- Applicant: Ho-Cheol Kim , Sang-min Park , Charles T. Rettner
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Main IPC: C03C15/00
- IPC: C03C15/00

Abstract:
A method of forming a block copolymer pattern comprises providing a substrate comprising a topographic pre-pattern comprising a ridge surface separated by a height, h, greater than 0 nanometers from a trench surface; disposing a block copolymer comprising two or more block components on the topographic pre-pattern to form a layer having a thickness of more than 0 nanometers over the ridge surface and the trench surface; and annealing the layer to form a block copolymer pattern having a periodicity of the topographic pre-pattern, the block copolymer pattern comprising microdomains of self-assembled block copolymer disposed on the ridge surface and the trench surface, wherein the microdomains disposed on the ridge surface have a different orientation compared to the microdomains disposed on the trench surface.
Public/Granted literature
- US20110059299A1 Method of Forming Self-Assembled Patterns Using Block Copolymers, and Articles Thereof Public/Granted day:2011-03-10
Information query