Invention Grant
- Patent Title: Imprint lithography
- Patent Title (中): 印刷光刻
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Application No.: US12817976Application Date: 2010-06-17
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Publication No.: US08349238B2Publication Date: 2013-01-08
- Inventor: Peter Bartus Leonard Meijer , Aleksey Yurievich Kolesnychenko
- Applicant: Peter Bartus Leonard Meijer , Aleksey Yurievich Kolesnychenko
- Applicant Address: NL Veldhoven NL Eindhoven
- Assignee: ASML Netherlands B.V.,Koninklijke Philips Electronics N.V.
- Current Assignee: ASML Netherlands B.V.,Koninklijke Philips Electronics N.V.
- Current Assignee Address: NL Veldhoven NL Eindhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: B28B1/14
- IPC: B28B1/14 ; B28B11/08 ; B29C39/00 ; B29C59/00 ; B44B5/02

Abstract:
An imprint template configured to imprint an imprintable medium by an imprint lithography process is disclosed, the imprint template having a pattern with a pattern density corresponding to a volume of imprintable medium used to substantially fill pattern features per unit area of a contact face of the imprint template, wherein adjacent regions of the pattern on the imprint template contact face, each of which will provide different functionality once imprinted onto a substrate, have substantially the same pattern density, have differences in pattern density which are minimized, or differences in pattern density which are maintained below a maximum.
Public/Granted literature
- US20100251913A1 IMPRINT LITHOGRAPHY Public/Granted day:2010-10-07
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