Provided is a plasma generator which can eliminate breakage due to thermal stress without deteriorating plasma generating efficiency. A plasma generator 1 has an base member 3 provided with a discharge space 5 and a pair of electrodes 9 provided on the base member 3 while sandwiching the discharge space 5 therebetween, wherein at least one electrode 7 of the pair of electrodes 9 has a plurality of electrode layers 15 provided at positions different from each other in a facing direction of the pair of electrodes 9.