Invention Grant
US08349283B2 Metal recovery method, metal recovery apparatus, gas exhaust system and film forming device using same
有权
金属回收方法，金属回收装置，排气系统及使用其的成膜装置
- Patent Title: Metal recovery method, metal recovery apparatus, gas exhaust system and film forming device using same
- Patent Title (中): 金属回收方法，金属回收装置，排气系统及使用其的成膜装置
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Application No.: US13058243Application Date: 2009-08-04
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Publication No.: US08349283B2Publication Date: 2013-01-08
- Inventor: Masamichi Hara , Atsushi Gomi , Tatsuo Hatano
- Applicant: Masamichi Hara , Atsushi Gomi , Tatsuo Hatano
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-206474 20080809
- International Application: PCT/JP2009/063810 WO 20090804
- International Announcement: WO2010/018768 WO 20100218
- Main IPC: B01D50/00
- IPC: B01D50/00 ; B01D53/64 ; H01L21/20
Abstract:
A metal recovery apparatus recovers metal components from an exhaust gas exhausted from a processing chamber in which a thin film is formed on the surface of a target substrate by using a source gas formed of an organic metal compound serving as a source, and scrubs the exhaust gas. The metal recovery apparatus 66 includes a trap unit having an adsorption member for attaching thereon metal components included in the source gas by heating the exhaust gas and thus thermally decomposing an unreacted source gas included in the exhaust gas; and the scrubbing unit including a catalyzer for oxidizing and thus scrubbing harmful gas components included in the exhaust gas that has flowed through the trap unit.
Public/Granted literature
- US20110206585A1 METAL RECOVERY METHOD, METAL RECOVERY APPARATUS, GAS EXHAUST SYSTEM AND FILM FORMING DEVICE USING SAME Public/Granted day:2011-08-25
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