A liquid droplet of a first liquid and a liquid droplet of a second liquid are mixed upon landing on a substrate, and then the reaction is initiated between the first and second liquid droplets. Accordingly, it is possible to avoid the problem which would have been caused when the two liquids are mixed in advance before the usage that the reaction between the two liquids is advanced before the liquids are actually coated. Further, since the ink-jet system is employed, it is possible to precisely control the liquid-droplet amount and the landing position, thereby landing the first and second liquids on a same position with high precision. Accordingly, a highly integrated pattern can be formed. Furthermore, since the mixing ratio of the first and second liquids can be precisely controlled, the film quality can be stabilized.