Invention Grant
- Patent Title: Lithographically defined microporous carbon structures
- Patent Title (中): 光刻定义的微孔碳结构
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Application No.: US12874971Application Date: 2010-09-02
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Publication No.: US08349547B1Publication Date: 2013-01-08
- Inventor: David Bruce Burckel , Cody M. Washburn , Ronen Polsky , Susan M. Brozik , David R. Wheeler
- Applicant: David Bruce Burckel , Cody M. Washburn , Ronen Polsky , Susan M. Brozik , David R. Wheeler
- Applicant Address: US NM Albuquerque
- Assignee: Sandia Corporation
- Current Assignee: Sandia Corporation
- Current Assignee Address: US NM Albuquerque
- Agent Kevin W. Bieg
- Main IPC: G03F7/26
- IPC: G03F7/26

Abstract:
A lithographic method is used to fabricate porous carbon structures that can provide electrochemical electrodes having high surface area with uniform and controllable dimensions, providing enormous flexibility to tailor the electrodes toward specific applications. Metal nanoparticles deposited on the surface of the porous carbon electrodes exhibit ultra small dimensions with uniform size distribution. The resulting electrodes are rugged, electrically conductive and show excellent electrochemical behavior.
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