Invention Grant
- Patent Title: Methods for manufacturing thin film transistor array substrate and display panel
- Patent Title (中): 制造薄膜晶体管阵列基板和显示面板的方法
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Application No.: US13318351Application Date: 2011-08-26
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Publication No.: US08349630B1Publication Date: 2013-01-08
- Inventor: Jehao Hsu , Jingfeng Xue , Xiaohui Yao
- Applicant: Jehao Hsu , Jingfeng Xue , Xiaohui Yao
- Applicant Address: CN Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Guangdong
- Priority: CN201110176756 20110628
- International Application: PCT/PC2011/078975 WO 20110826
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The present invention provides methods for manufacturing a thin film transistor (TFT) array substrate and a display panel. The method for manufacturing the TFT array substrate comprises the following steps: forming a plurality of gate electrodes, a gate insulating layer, a semiconductor layer, an ohmic contact layer, an electrode layer and a photo-resist layer on a transparent substrate in sequence; using a multi tone mask to pattern the photo-resist layer; forming a plurality of source electrodes and a plurality of drain electrodes at both sides of the channels, respectively; heating the photo-resist layer; etching the semiconductor layer; removing the photo-resist layer; forming a passivation layer on the channels, the source electrodes and the drain electrodes; and forming a pixel electrode layer on the passivation layer. The present invention can reduce an amount of the required masks in the fabrication process, and only one wet etching is required to etch the metal material on the TFT array substrate.
Public/Granted literature
- US20130029441A1 METHODS FOR MANUFACTURING THIN FILM TRANSISTOR ARRAY SUBSTRATE AND DISPLAY PANEL Public/Granted day:2013-01-31
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