Invention Grant
- Patent Title: Method of manufacturing solid-state image sensor
- Patent Title (中): 制造固态图像传感器的方法
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Application No.: US13096703Application Date: 2011-04-28
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Publication No.: US08349640B2Publication Date: 2013-01-08
- Inventor: Takehiko Soda
- Applicant: Takehiko Soda
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2010-123297 20100528
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing an image sensor having a plurality of pixels, each pixel having a photoelectric converter including an accumulation region, and a transfer gate, the accumulation region extending under a corresponding transfer gate, the plurality of pixels including a plurality of pixel groups, each pixel group including N adjacent pixels, and the channels of the N adjacent pixels, in each pixel group, being configured to transfer the charges of the N adjacent pixels away from each other, the method comprising a step of forming a resist pattern having one opening corresponding to each pixel group, and a step of forming a charge accumulation region for each of the N adjacent pixels by implanting ions into a substrate through the one opening of the resist pattern along N ion implantation directions so as to implant the ions under the transfer gate of each of the N adjacent pixels.
Public/Granted literature
- US20110294251A1 METHOD OF MANUFACTURING SOLID-STATE IMAGE SENSOR Public/Granted day:2011-12-01
Information query
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