Invention Grant
- Patent Title: Manufacturing method of leadframe and semiconductor device
- Patent Title (中): 引线框和半导体器件的制造方法
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Application No.: US12877457Application Date: 2010-09-08
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Publication No.: US08349656B2Publication Date: 2013-01-08
- Inventor: Yusuke Etou , Naoki Fukami , Kiyoshi Matsunaga
- Applicant: Yusuke Etou , Naoki Fukami , Kiyoshi Matsunaga
- Applicant Address: JP Fukuoka
- Assignee: Mitsui High-Tec, Inc.
- Current Assignee: Mitsui High-Tec, Inc.
- Current Assignee Address: JP Fukuoka
- Agency: Greenblum & Bernstein P.L.C.
- Priority: JP2009-207786 20090909
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
In order to remove plating burrs generated in etching step, there is provided a manufacturing method of semiconductor devices on each of unit leadframes in a leadframe material in which a plurality of the unit leadframes are arranged in plural rows or a single row, wherein at least two types of plating burr removals are conducted after a half-etching is performed onto a front surface side of the leadframe material, using a first plating layer as resist film.
Public/Granted literature
- US20110059577A1 MANUFACTURING METHOD OF LEADFRAME AND SEMICONDUCTOR DEVICE Public/Granted day:2011-03-10
Information query
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