Invention Grant
US08349678B2 Laterally diffused metal oxide semiconductor transistor with partially unsilicided source/drain
有权
具有部分非硅源极/漏极的侧向扩散的金属氧化物半导体晶体管
- Patent Title: Laterally diffused metal oxide semiconductor transistor with partially unsilicided source/drain
- Patent Title (中): 具有部分非硅源极/漏极的侧向扩散的金属氧化物半导体晶体管
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Application No.: US12701824Application Date: 2010-02-08
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Publication No.: US08349678B2Publication Date: 2013-01-08
- Inventor: Harry-Hak-Lay Chuang , Lee-Wee Teo , Ming Zhu
- Applicant: Harry-Hak-Lay Chuang , Lee-Wee Teo , Ming Zhu
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman Ham & Berner, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method of fabricating a laterally diffused metal oxide semiconductor (LDMOS) transistor includes forming a dummy gate over a substrate. A source and a drain are formed over the substrate on opposite sides of the dummy gate. A first silicide is formed on the source. A second silicide is formed on the drain so that an unsilicided region of at least one of the drain or the source is adjacent to the dummy gate. The unsilicided region of the drain provides a resistive region capable of sustaining a voltage load suitable for a high voltage LDMOS application. A replacement gate process is performed on the dummy gate to form a gate.
Public/Granted literature
- US20110193162A1 LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR TRANSISTOR WITH PARTIALLY UNSILICIDED SOURCE/DRAIN Public/Granted day:2011-08-11
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