发明授权
US08349695B2 Work function adjustment in high-k gate stacks including gate dielectrics of different thickness
有权
在高k栅极堆叠中的功能调整包括不同厚度的栅极电介质
- 专利标题: Work function adjustment in high-k gate stacks including gate dielectrics of different thickness
- 专利标题(中): 在高k栅极堆叠中的功能调整包括不同厚度的栅极电介质
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申请号: US12848741申请日: 2010-08-02
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公开(公告)号: US08349695B2公开(公告)日: 2013-01-08
- 发明人: Thilo Scheiper , Andy Wei , Martin Trentzsch
- 申请人: Thilo Scheiper , Andy Wei , Martin Trentzsch
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES, Inc.
- 当前专利权人: GLOBALFOUNDRIES, Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Williams, Morgan & Amerson
- 优先权: DE102009039418 20090831
- 主分类号: H01L23/336
- IPC分类号: H01L23/336
摘要:
In sophisticated manufacturing techniques, the work function and thus the threshold voltage of transistor elements may be adjusted in an early manufacturing stage by providing a work function adjusting species within the high-k dielectric material with substantially the same spatial distribution in the gate dielectric materials of different thickness. After the incorporation of the work function adjusting species, the final thickness of the gate dielectric materials may be adjusted by selectively forming an additional dielectric layer so that the further patterning of the gate electrode structures may be accomplished with a high degree of compatibility to conventional manufacturing techniques. Consequently, extremely complicated processes for re-adjusting the threshold voltages of transistors having a different thickness gate dielectric material may be avoided.
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