Invention Grant
- Patent Title: Method of fabricating copper damascene and dual damascene interconnect wiring
- Patent Title (中): 铜镶嵌和双镶嵌互连布线的制作方法
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Application No.: US13301837Application Date: 2011-11-22
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Publication No.: US08349728B2Publication Date: 2013-01-08
- Inventor: Jeffrey P. Gambino , William Hill , Kenneth E. McAvey, Jr. , Thomas L. McDevitt , Anthony K. Stamper , Arthur C. Winslow , Robert Zwonik
- Applicant: Jeffrey P. Gambino , William Hill , Kenneth E. McAvey, Jr. , Thomas L. McDevitt , Anthony K. Stamper , Arthur C. Winslow , Robert Zwonik
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Richard Korulak
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
An integrated circuit and a method of manufacturing the integrated circuit, the method including: (a) providing a substrate; (b) forming a copper diffusion barrier layer on the substrate; (c) forming a dielectric layer on a top surface of the copper diffusion barrier layer; (d) forming a copper damascene or dual damascene wire in the dielectric layer, a top surface of the copper damascene or dual damascene wire coplanar with a top surface of the dielectric layer; (e) forming a first capping layer on the top surface of the wire and the top surface of the dielectric layer; (f) after step (e) performing one or more characterization procedures in relation to said integrated circuit; and (g) after step (e) forming a second capping layer on a top surface of the first capping layer.
Public/Granted literature
- US20120064718A1 METHOD OF FABRICATING COPPER DAMASCENE AND DUAL DAMASCENE INTERCONNECT WIRING Public/Granted day:2012-03-15
Information query
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