Invention Grant
US08349985B2 Boron-containing hydrogen silsesquioxane polymer, integrated circuit device formed using the same, and associated methods 有权
含硼氢倍半硅氧烷聚合物,使用其形成的集成电路器件及其相关方法

Boron-containing hydrogen silsesquioxane polymer, integrated circuit device formed using the same, and associated methods
Abstract:
A composition includes a boron-containing hydrogen silsesquioxane polymer having a structure that includes: silicon-oxygen-silicon units, and oxygen-boron-oxygen linkages in which the boron is trivalent, wherein two silicon-oxygen-silicon units are covalently bound by an oxygen-boron-oxygen linkage therebetween.
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