Invention Grant
- Patent Title: Compound for resist and radiation-sensitive composition
- Patent Title (中): 抗蚀剂和辐射敏感组合物的化合物
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Application No.: US13051155Application Date: 2011-03-18
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Publication No.: US08350096B2Publication Date: 2013-01-08
- Inventor: Masatoshi Echigo , Dai Oguro
- Applicant: Masatoshi Echigo , Dai Oguro
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2004-374003 20041224; JP2005-076319 20050317; JP2005-142162 20050516; JP2005-194941 20050704
- Main IPC: C07C39/12
- IPC: C07C39/12 ; C07C39/16 ; G03F7/004

Abstract:
A radiation-sensitive composition containing 1 to 80% by weight of a solid component and 20 to 99% by weight of a solvent. The solid component contains a compound B which has (a) a structure derived from a polyphenol compound A by introducing an acid-dissociating group to at least one phenolic hydroxyl group of the polyphenol compound A which is synthesized by a condensation between a di- to tetrafunctional aromatic ketone or aromatic aldehyde each having 5 to 36 carbon atoms with a compound having 1 to 3 phenolic hydroxyl groups and 6 to 15 carbon atoms, and (b) a molecular weight of 400 to 2000. The composition containing the compound B is useful as an acid-amplified, non-polymeric resist material, because it is highly sensitive to radiation such as KrF excimer lasers, extreme ultraviolet rays, electron beams, and X-rays, and provides resist patterns with a high resolution, high heat resistance, and high etching resistance.
Public/Granted literature
- US20110165516A1 COMPOUND FOR RESIST AND RADIATION-SENSITIVE COMPOSITION Public/Granted day:2011-07-07
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