Invention Grant
US08350213B2 Charged particle beam detection unit with multi type detection subunits
有权
带多个检测子单元的带电粒子束检测单元
- Patent Title: Charged particle beam detection unit with multi type detection subunits
- Patent Title (中): 带多个检测子单元的带电粒子束检测单元
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Application No.: US12715766Application Date: 2010-03-02
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Publication No.: US08350213B2Publication Date: 2013-01-08
- Inventor: Joe Wang , Xu Zhang , Zhongwei Chen
- Applicant: Joe Wang , Xu Zhang , Zhongwei Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Hermes Microvision Inc.
- Current Assignee: Hermes Microvision Inc.
- Current Assignee Address: TW Hsin-Chu
- Agency: Stout, Uxa, Buyan & Mullins, LLP
- Main IPC: H01J37/26
- IPC: H01J37/26
Abstract:
A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B charged particle analyzer). The imaging system is suitable for a low beam current, high resolution mode and a high beam current, high throughput mode. The unit can be applied to a scanning electron inspection system as well as to other systems that use a charged particle beam as an observation tool.
Public/Granted literature
- US20110215241A1 Charged Particle Beam Detection Unit with Multi Type Detection Subunits Public/Granted day:2011-09-08
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