Invention Grant
- Patent Title: Processing system
- Patent Title (中): 处理系统
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Application No.: US13336155Application Date: 2011-12-23
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Publication No.: US08350227B2Publication Date: 2013-01-08
- Inventor: Holger Doemer , Stefan Martens , Walter Mack
- Applicant: Holger Doemer , Stefan Martens , Walter Mack
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- Priority: DE102008045336 20080901
- Main IPC: G21K5/04
- IPC: G21K5/04

Abstract:
A processing system includes a particle beam column for generating a particle beam directed to a first processing location; a laser system for generating a laser beam directed to a second processing location located at a distance from the first processing location; and a protector including an actuator and a plate connected to the actuator. The actuator is configured to move the plate between a first position in which it protects a component of the particle beam column from particles released from the object by the laser beam and a second position in which the component of the particle beam column is not protected from particles released from the object by the laser beam.
Public/Granted literature
- US20120091363A1 PROCESSING SYSTEM Public/Granted day:2012-04-19
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