Invention Grant
- Patent Title: Automated slice milling for viewing a feature
- Patent Title (中): 自动切片铣削以查看特征
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Application No.: US12751496Application Date: 2010-03-31
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Publication No.: US08350237B2Publication Date: 2013-01-08
- Inventor: Ryan Tanner
- Applicant: Ryan Tanner
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Main IPC: H01J37/14
- IPC: H01J37/14 ; H01J37/28

Abstract:
A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.
Public/Granted literature
- US20110240852A1 AUTOMATED SLICE MILLING FOR VIEWING A FEATURE Public/Granted day:2011-10-06
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