Invention Grant
- Patent Title: Light-receiving device and manufacturing method for a light-receiving device
- Patent Title (中): 光接收装置及其制造方法
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Application No.: US12543706Application Date: 2009-08-19
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Publication No.: US08350290B2Publication Date: 2013-01-08
- Inventor: Makoto Miyoshi , Mitsuhiro Tanaka
- Applicant: Makoto Miyoshi , Mitsuhiro Tanaka
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2008-252316 20080930; JP2009-168485 20090717
- Main IPC: H01L31/108
- IPC: H01L31/108 ; H01L31/18

Abstract:
Provided is a light-receiving device which has light-receiving sensitivity superior to that of a conventional Schottky diode type light-receiving device and also has sufficiently-strengthened junction of a Schottky electrode. A first contact layer formed of AlGaN and having conductivity, a light-receiving layer formed of AlGaN, and a second contact layer formed of AlN and having a thickness of 5 nm are epitaxially formed on a predetermined substrate in the stated order, and a second electrode is brought into Schottky junction with the second contact layer, to thereby form MIS junction. Further, after the Schottky junction, heat treatment is performed under a nitrogen gas atmosphere at 600° C. for 30 seconds.
Public/Granted literature
- US20100078679A1 LIGHT-RECEIVING DEVICE AND MANUFACTURING METHOD FOR A LIGHT-RECEIVING DEVICE Public/Granted day:2010-04-01
Information query
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