Invention Grant
- Patent Title: Device structure including high-thermal-conductivity substrate
- Patent Title (中): 器件结构包括高导热基板
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Application No.: US12030594Application Date: 2008-02-13
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Publication No.: US08350295B1Publication Date: 2013-01-08
- Inventor: Paul Saunier , Edward Beam , Deep Dumka
- Applicant: Paul Saunier , Edward Beam , Deep Dumka
- Applicant Address: US OR Hillsboro
- Assignee: TriQuint Semiconductor, Inc.
- Current Assignee: TriQuint Semiconductor, Inc.
- Current Assignee Address: US OR Hillsboro
- Agency: Schwabe Williamson & Wyatt
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
Methods and apparatuses for forming a device structure including a high-thermal-conductivity substrate are disclosed herein. A method forming such a device structure may comprise forming an active layer over a first substrate in a manner such that a frontside of the active layer faces the first substrate and a backside of the active layer faces away from the first substrate, forming a second substrate over the backside of the active layer, and removing the first substrate to expose the frontside of the active layer. Other embodiments are described and claimed.
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