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US08350301B2 Semiconductor photodiode device and manufacturing method thereof 失效
半导体光电二极管装置及其制造方法

Semiconductor photodiode device and manufacturing method thereof
Abstract:
A semiconductor photodiode includes a semiconductor substrate; a first conduction type first semiconductor layer formed above the semiconductor substrate; a high resistance second semiconductor layer formed above the first semiconductor layer; a first conduction type third semiconductor layer formed above the second semiconductor layer; and a second conduction type fourth semiconductor layer buried in the second semiconductor layer, in which the fourth semiconductor layer is separated at a predetermined distance in a direction horizontal to the surface of the semiconductor substrate.
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