Invention Grant
- Patent Title: Display device and sputtering target for producing the same
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Application No.: US13286284Application Date: 2011-11-01
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Publication No.: US08350303B2Publication Date: 2013-01-08
- Inventor: Hiroshi Gotoh , Toshihiro Kugimiya , Katsufumi Tomihisa
- Applicant: Hiroshi Gotoh , Toshihiro Kugimiya , Katsufumi Tomihisa
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-040787 20050217; JP2005-344679 20051129
- Main IPC: H01L27/085
- IPC: H01L27/085

Abstract:
A display device in which an Al alloy film and a conductive oxide film are directly connected without interposition of refractory metal and some or all of Al alloy components deposit or are concentrated at the interface of contact between the Al alloy film and the conductive oxide film. The Al alloy film contains 0.1 to 6 at % of at least one element selected from the group consisting of Ni, Ag, Zn, Cu and Ge, and further contains 1) 0.1 to 2 at % of at least one element selected from the group consisting of Mg, Cr, Mn, Ru, Rh, Pd, Ir, Pt, La, Ce, Pr, Gd, Tb, Sm, Eu, Ho, Er, Tm, Yb, Lu and Dy or 2) 0.1 to 1 at % of at least one element selected from the group consisting of Ti, V, Zr, Nb, Mo, Hf, Ta and W, as the alloy components.
Public/Granted literature
- US20120091591A1 DISPLAY DEVICE AND SPUTTERING TARGET FOR PRODUCING THE SAME Public/Granted day:2012-04-19
Information query
IPC分类: