Invention Grant
US08350316B2 Phase change memory cells having vertical channel access transistor and memory plane
有权
具有垂直通道存取晶体管和存储器平面的相变存储单元
- Patent Title: Phase change memory cells having vertical channel access transistor and memory plane
- Patent Title (中): 具有垂直通道存取晶体管和存储器平面的相变存储单元
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Application No.: US12471287Application Date: 2009-05-22
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Publication No.: US08350316B2Publication Date: 2013-01-08
- Inventor: Hsiang-Lan Lung , Chung Hon Lam , Ming-Hsiu Lee , Bipin Rajendran
- Applicant: Hsiang-Lan Lung , Chung Hon Lam , Ming-Hsiu Lee , Bipin Rajendran
- Applicant Address: TW Hsinchu US NY Armonk
- Assignee: Macronix International Co., Ltd.,International Business Machines Corporation
- Current Assignee: Macronix International Co., Ltd.,International Business Machines Corporation
- Current Assignee Address: TW Hsinchu US NY Armonk
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L29/732
- IPC: H01L29/732

Abstract:
Memory devices are described along with methods for manufacturing. A memory device as described herein comprises a plurality of word lines overlying a plurality of bit lines, and a plurality of field effect transistors. Field effect transistors in the plurality of field effect transistors comprises a first terminal electrically coupled to a corresponding bit line in the plurality of bit lines, a second terminal overlying the first terminal, and a channel region separating the first and second terminals and adjacent a corresponding word line in the plurality of word lines. The corresponding word line acts as the gate of the field effect transistor. A dielectric separates the corresponding word line from the channel region. A memory plane comprises programmable resistance memory material electrically coupled to respective second terminals of the field effect transistors, and conductive material on the programmable resistance memory material and coupled to a common voltage.
Public/Granted literature
- US20100295009A1 Phase Change Memory Cells Having Vertical Channel Access Transistor and Memory Plane Public/Granted day:2010-11-25
Information query
IPC分类: