Invention Grant
US08350328B2 Semiconductor device and method of manufacturing the same 失效
半导体装置及其制造方法

Semiconductor device and method of manufacturing the same
Abstract:
Characteristics of a semiconductor device having a FINFET are improved. The FINFET has: a channel layer arranged in an arch shape on a semiconductor substrate and formed of monocrystalline silicon; a front gate electrode formed on a part of an outside of the channel layer through a front gate insulating film; and a back gate electrode formed so as to be buried inside the channel layer through a back gate insulating film. The back gate electrode arranged inside the arch shape is arranged so as to pass through the front gate electrode.
Public/Granted literature
Information query
Patent Agency Ranking
0/0