Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12759559Application Date: 2010-04-13
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Publication No.: US08350328B2Publication Date: 2013-01-08
- Inventor: Takashi Ishigaki , Ryuta Tsuchiya , Yusuke Morita , Nobuyuki Sugii
- Applicant: Takashi Ishigaki , Ryuta Tsuchiya , Yusuke Morita , Nobuyuki Sugii
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles and Stockbridge P.C.
- Priority: JP2009-98072 20090414
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
Characteristics of a semiconductor device having a FINFET are improved. The FINFET has: a channel layer arranged in an arch shape on a semiconductor substrate and formed of monocrystalline silicon; a front gate electrode formed on a part of an outside of the channel layer through a front gate insulating film; and a back gate electrode formed so as to be buried inside the channel layer through a back gate insulating film. The back gate electrode arranged inside the arch shape is arranged so as to pass through the front gate electrode.
Public/Granted literature
- US20100258871A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-10-14
Information query
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