Invention Grant
- Patent Title: Optical sensor
- Patent Title (中): 光学传感器
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Application No.: US13139599Application Date: 2009-12-22
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Publication No.: US08350350B2Publication Date: 2013-01-08
- Inventor: Jun Suzuki , Fumikazu Ojima , Ryusuke Kitaura
- Applicant: Jun Suzuki , Fumikazu Ojima , Ryusuke Kitaura
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2009-000926 20090106
- International Application: PCT/JP2009/071316 WO 20091222
- International Announcement: WO2010/079686 WO 20100715
- Main IPC: H01L31/024
- IPC: H01L31/024

Abstract:
In an infrared sensor (1) having a bolometer element (11) and a reference element (21), the reference element (21) comprises a bolometer film (22), a substrate-side insulating film (31) formed on the substrate-side surface of the bolometer film (22), a heat dissipation film (23) made of amorphous silicon formed on the substrate-side surface of the bolometer film (22) with the substrate-side insulating film (31) interposed therebetween, and a plurality of heat dissipation columns (25) made of amorphous silicon thermally connected to the heat dissipation film (23) and a substrate (10), while the bolometer film (22) and substrate-side insulating film (31) are formed such as to extend over a side face of the heat dissipation film (23) intersecting a surface of the substrate (10). Thus configured infrared sensor (1) can efficiently reduce the influence of temperature changes in the environment in use, while being made smaller.
Public/Granted literature
- US20110241154A1 OPTICAL SENSOR Public/Granted day:2011-10-06
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