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US08350366B2 Power semiconductor element with two-stage impurity concentration profile 有权
功率半导体元件具有两级杂质浓度分布

Power semiconductor element with two-stage impurity concentration profile
Abstract:
A power semiconductor component having a pn junction, a body with a first basic conductivity, a well-like region with a second conductivity which is arranged horizontally centrally in the body, has a first two-level doping profile and has a first penetration depth from the first main surface into the body. In addition, this power semiconductor component has an edge structure which is arranged between the well-like region and the edge of the power semiconductor component and which comprises a plurality of field rings with a single-level doping profile, a second conductivity and a second penetration depth, wherein the first penetration depth is no more than about 50% of the second penetration depth.
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