Invention Grant
- Patent Title: Semiconductor device and semiconductor storage device
- Patent Title (中): 半导体器件和半导体存储器件
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Application No.: US12199022Application Date: 2008-08-27
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Publication No.: US08350387B2Publication Date: 2013-01-08
- Inventor: Kanae Uchida , Masato Endo , Kazuyuki Higashi
- Applicant: Kanae Uchida , Masato Endo , Kazuyuki Higashi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-222600 20070829
- Main IPC: H01L23/52
- IPC: H01L23/52

Abstract:
A semiconductor storage device includes a memory cell transistor and a selective transistor formed on a semiconductor substrate, a first interlayer insulating film which is formed on the semiconductor substrate, an insulating layer formed by use of a material higher in dielectric constant than the first interlayer insulating film, a contact plug which penetrates the insulating layer and the first interlayer insulating film and which is electrically connected to a drain of the selective transistor, and a bit line which is in contact with the contact plug. A partial region in the bottom surface of the bit line is located lower than the upper surface of the contact plug, and is in contact with the surface of the insulating layer, and the partial region is also in contact with the side surface of the contact plug.
Public/Granted literature
- US20090091040A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2009-04-09
Information query
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