Invention Grant
US08350449B2 Quartz crystal device using at-cut quartz substrate and manufacturing the same 失效
石英晶体器件采用切割石英衬底制造相同

Quartz crystal device using at-cut quartz substrate and manufacturing the same
Abstract:
The quartz crystal device of a first aspect comprises a quartz crystal element having an vibrating portion which vibrates when a voltage is applied and a frame portion which surrounds the periphery of the vibrating portion, the quartz crystal element being formed of an AT-cut quartz crystal material specified by the X-axis, the Y′-axis and the Z′-axis; a base which is bonded to one main surface of the frame portion, the base being formed of a Z-cut quartz crystal material specified by the X-axis, the Y-axis and the Z-axis; and a lid which is bonded to other main surface of the frame portion, the frame portion being formed of the Z-cut quartz crystal material. The Z′-axis of the quartz crystal element is coincident with the X-axis or the Y-axis of the base and the lid.
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