Invention Grant
- Patent Title: Wiring nanoscale sensors with nanomechanical resonators
- Patent Title (中): 用纳米机械谐振器接线纳米级传感器
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Application No.: US12708360Application Date: 2010-02-18
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Publication No.: US08350578B2Publication Date: 2013-01-08
- Inventor: Akram Sarwat Sadek , Rassul Bulatovich Karabalin , Michael L. Roukes , Sotirios K. Masmanidis
- Applicant: Akram Sarwat Sadek , Rassul Bulatovich Karabalin , Michael L. Roukes , Sotirios K. Masmanidis
- Applicant Address: US CA Pasadena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: US CA Pasadena
- Agency: Gates & Cooper LLP
- Main IPC: G01R29/22
- IPC: G01R29/22 ; G01R23/00 ; H01L41/00

Abstract:
A system, device, method, and apparatus provide the ability to wire a voltage sensitive device to a nanoelectromechanical system (NEMS) resonator. A voltage sensitive device is configured to detect one or more voltage signals and output one or more electrical potentials in real-time. An array of piezoelectric NEMS resonators (with each resonator tuned to a unique frequency) is used to receive the output electrical potentials and convert each output electrical potential to a corresponding resonance frequency varying signal. The output signal from each resonator varies in linear proportion to the resonator's corresponding frequency variation arising from the applied electrical potential. The frequency varying signals are multiplexed together into a single readout signal path that is monitored to determine variations in vibrational amplitude. A demodulation device deconvolves the multiplexed frequency varying signals to recover and uniquely identify the output electrical signal.
Public/Granted literature
- US20100219914A1 WIRING NANOSCALE SENSORS WITH NANOMECHANICAL RESONATORS Public/Granted day:2010-09-02
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