Invention Grant
- Patent Title: Radiation beam modification apparatus and method
- Patent Title (中): 辐射束修改装置及方法
-
Application No.: US12774284Application Date: 2010-05-05
-
Publication No.: US08351022B2Publication Date: 2013-01-08
- Inventor: Wilhelmus Petrus De Boeij , Leon Martin Levasier
- Applicant: Wilhelmus Petrus De Boeij , Leon Martin Levasier
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G02B5/22
- IPC: G02B5/22 ; G02B26/02 ; G03B27/32 ; G03B27/42 ; G03B27/54 ; G03B27/72

Abstract:
A radiation beam modification apparatus for controlling a property of a beam of radiation in a lithographic apparatus includes a flexible sheet provided with a plurality of apertures, and a positioning apparatus comprising a first rotatable member and a second rotatable member, wherein a first end portion of the flexible sheet is coupled to the first rotatable member, a second end portion of the flexible sheet is coupled to the second rotatable member and a central portion of the flexible sheet extends between the first rotatable member and the second rotatable member. The apertures may be used to control the numerical aperture of a projection system of a lithographic apparatus.
Public/Granted literature
- US20100315612A1 Radiation Beam Modification Apparatus and Method Public/Granted day:2010-12-16
Information query