Invention Grant
US08351053B2 Apparatus and method for in situ testing of microscale and nanoscale samples 失效
用于微尺度和纳米级样品的原位测试的装置和方法

Apparatus and method for in situ testing of microscale and nanoscale samples
Abstract:
According to example embodiments of the invention, a microscale testing stage comprises a frame having first and second opposing ends and first and second side beams, at least one deformable force sensor beam, a first longitudinal beam having a free end, a second longitudinal beam having a facing free end, a support structure, and a pair of slots disposed at each of the free ends. In certain embodiments, a separately fabricated microscale or nanoscale specimen comprises a central gauge length portion of a material to be tested, and first and second hinges providing a self-aligning mechanism for uniaxial loading. In other embodiments, a layer of a conductive material defines first and second conductive paths and an open circuit that can be closed by the specimen across the gap. In other embodiments, the stage is formed of a high melting temperature material.
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