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US08351106B2 Elastomeric device for tunable imaging 有权
用于可调谐成像的弹性装置

Elastomeric device for tunable imaging
Abstract:
An optical micro-electro-mechanical systems (MEMS) structure is provided. The structure includes an elastomer membrane, a plurality of polymer fibers attached to the elastomer membrane, an array of detectors operatively connected to the plurality of polymer fibers at a first end of the plurality of polymer fibers, and a microlens array operatively connected to the plurality of polymer fibers at a second end of the plurality of polymer fibers. A method of manufacturing an optical MEMS structure is provided. The method includes forming a hollow PDMS chamber in which PDMS fibers extend from top to bottom using a lost wax molding process.
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