Invention Grant
US08351625B2 Acoustic sensor and microphone 有权
声传感器和麦克风

  • Patent Title: Acoustic sensor and microphone
  • Patent Title (中): 声传感器和麦克风
  • Application No.: US13318261
    Application Date: 2011-03-16
  • Publication No.: US08351625B2
    Publication Date: 2013-01-08
  • Inventor: Takashi Kasai
  • Applicant: Takashi Kasai
  • Applicant Address: JP Kyoto
  • Assignee: OMRON Corporation
  • Current Assignee: OMRON Corporation
  • Current Assignee Address: JP Kyoto
  • Agency: Nutter McClennen & Fish LLP
  • Agent John J. Penny, V.
  • Priority: JP2011-036903 20110223
  • International Application: PCT/JP2011/056248 WO 20110316
  • International Announcement: WO2012/114535 WO 20120830
  • Main IPC: H04R25/00
  • IPC: H04R25/00
Acoustic sensor and microphone
Abstract:
Provided is an acoustic sensor capable of improving an S/N ratio of a sensor without preventing reduction in size of the sensor. A back chamber 45 is vertically opened in a silicon substrate 42. A thin film-like diaphragm 43 to serve as a movable electrode plate is formed on the top surface of the substrate 42 so as to cover the back chamber 45. The back plate 48 is fixed to the top surface of the substrate 42 so as to cover the diaphragm 43, and a fixed electrode plate 49 is provided on the under surface of the back plate 48. Further, the diaphragm 43 is divided into a plurality of areas by the slit 47, and the respective plurally divided diaphragms 43a, 43b and the fixed electrode plate 49 constitute a plurality of parallelly connected capacitors (acoustic sensing sections 60a, 60b).
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