Invention Grant
- Patent Title: Side-ported MEMS microphone assembly
- Patent Title (中): 侧端MEMS麦克风组件
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Application No.: US12323703Application Date: 2008-11-26
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Publication No.: US08351634B2Publication Date: 2013-01-08
- Inventor: Aleksey S. Khenkin
- Applicant: Aleksey S. Khenkin
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: H01L23/495
- IPC: H01L23/495

Abstract:
A side-ported MEMS microphone package defines an acoustic path from a side of the package substrate to a microphone die disposed within a chamber defined by the substrate and a lid attached to the substrate. Optionally or alternatively, a circuit board, to which the microphone package is mounted, may define an acoustic path from an edge of the circuit board to a location under the microphone package, adjacent a bottom port on the microphone package. In either case, the acoustic path may be a hollow passage through at least a portion of the substrate or the circuit board. The passage may be defined by holes, channels, notches, etc. defined in each of several layers of a laminated substrate or circuit board, or the passage may be defined by holes drilled, molded or otherwise formed in a solid or laminated substrate or circuit board.
Public/Granted literature
- US20100128914A1 Side-ported MEMS microphone assembly Public/Granted day:2010-05-27
Information query
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