Invention Grant
US08351635B2 Silicon-based microphone structure with electromagnetic interference shielding means 有权
具有电磁干扰屏蔽手段的硅基麦克风结构

Silicon-based microphone structure with electromagnetic interference shielding means
Abstract:
A silicon-based microphone structure, flip-chip mounted a substrate, has a backside and a via hole formed on the backside. A conductive layer covers the backside and the inner walls of the via hole. A solder ring is attached to the silicon-based microphone structure and electrically connected to the conductive layer.
Information query
Patent Agency Ranking
0/0