Invention Grant
- Patent Title: Substrate processing apparatus and display method for substrate processing apparatus
- Patent Title (中): 基板处理装置及基板处理装置的显示方法
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Application No.: US12632295Application Date: 2009-12-07
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Publication No.: US08352069B2Publication Date: 2013-01-08
- Inventor: Junichi Kawasaki
- Applicant: Junichi Kawasaki
- Applicant Address: JP Tokyo
- Assignee: Hitachi Kokusai Electric Inc.
- Current Assignee: Hitachi Kokusai Electric Inc.
- Current Assignee Address: JP Tokyo
- Agency: Brundidge & Stanger, P.C.
- Priority: JP2008-313853 20081210; JP2009-260498 20091113
- Main IPC: G06F7/00
- IPC: G06F7/00 ; G01R31/26

Abstract:
During a carrying operation, the position, transportation origin, and transportation destination of a carrier or a boat can be easily checked. A carrying system is configured to carry a substrate, a manipulation unit is configured to display an operation state of the carrying system on a manipulation screen, and a control unit is configured to control an operation of the carrying system. The manipulation unit displays a carrying system icon indicating the carrying system which is a carrying target object and a carrying-out icon at predetermined positions of the manipulation screen corresponding to a transportation origin of the carrying system, and a carrying-in icon at a predetermined position of the manipulation screen corresponding to the transportation destination of the carrying system.
Public/Granted literature
- US20100152887A1 SUBSTRATE PROCESSING APPARATUS AND DISPLAY METHOD FOR SUBSTRATE PROCESSING APPARATUS Public/Granted day:2010-06-17
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