Invention Grant
US08352892B2 Method, computer-readable storage medium, and apparatus for generating a mask data and fabricating process
有权
方法，计算机可读存储介质和用于产生掩模数据和制造过程的装置
- Patent Title: Method, computer-readable storage medium, and apparatus for generating a mask data and fabricating process
- Patent Title (中): 方法，计算机可读存储介质和用于产生掩模数据和制造过程的装置
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Application No.: US13176815Application Date: 2011-07-06
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Publication No.: US08352892B2Publication Date: 2013-01-08
- Inventor: Manabu Hakko , Miyoko Kawashima
- Applicant: Manabu Hakko , Miyoko Kawashima
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-156184 20100708
- Main IPC: G06F17/50
- IPC: G06F17/50
Abstract:
The present invention provides a generation method that obtains a position at which an auxiliary pattern is to be placed and generates a mask pattern (its data), which achieves excellent imaging performance, even when a halftone mask is used as an original.
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