Invention Grant
US08359908B2 Surface texture measuring device 有权
表面纹理测量装置

Surface texture measuring device
Abstract:
A surface texture measuring device includes a rotation driving device configured to rotate a measured substance, a roughness detector including a stylus provided displaceably at a tip of a detector main body and at least one skid provided at the tip of the detector main body and in the proximity of the stylus and outputting displacement of the stylus based on the skid as an electric signal, and a detector driving device configured to drive a detector holder. The detector holder includes a guide member driven by the detector driving device, a slide member configured to hold the roughness detector and provided slidably in a displacement direction of the stylus to the guide member, and an urging member configured to urge the slide member so that the skid always comes in contact with the measurement face of the measured substance.
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