发明授权
US08360640B2 X-ray tube and method for examining a target by scanning with an electron beam 有权
X射线管和用电子束扫描检查靶的方法

  • 专利标题: X-ray tube and method for examining a target by scanning with an electron beam
  • 专利标题(中): X射线管和用电子束扫描检查靶的方法
  • 申请号: US12521622
    申请日: 2007-12-28
  • 公开(公告)号: US08360640B2
    公开(公告)日: 2013-01-29
  • 发明人: Alfred Reinhold
  • 申请人: Alfred Reinhold
  • 申请人地址: DE Hamburg
  • 专利权人: YXLON International GmbH
  • 当前专利权人: YXLON International GmbH
  • 当前专利权人地址: DE Hamburg
  • 代理机构: Leydig, Voit & Mayer, Ltd.
  • 优先权: DE102006062452 20061228
  • 国际申请: PCT/EP2007/011463 WO 20071228
  • 国际公布: WO2008/080624 WO 20080710
  • 主分类号: G01D18/00
  • IPC分类号: G01D18/00 H01J35/14
X-ray tube and method for examining a target by scanning with an electron beam
摘要:
The invention relates to an X-ray tube, especially a microfocus X-ray tube (2), comprising means (18) for orienting an electron beam (10) towards a target (4). A control device (20) is used to control the means for orienting the electron beam (10) towards the target (4) in such a way that the electron beam (10) scans the target (4), in addition to a measuring device (22) for measuring the intensity of the target current which flows to different scanning sites when the target (4) is scanned by the electron beam (10), or a measuring variable dependent on the target current, and an evaluation device (24) for associating each measured value of the target flow with the corresponding scanning site. Said X-ray tube enables the easy and economical implementation of a method for checking the operability of the target (4).
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