发明授权
US08361222B2 Method for producing group III nitride-based compound semiconductor
有权
制备III族氮化物基化合物半导体的方法
- 专利标题: Method for producing group III nitride-based compound semiconductor
- 专利标题(中): 制备III族氮化物基化合物半导体的方法
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申请号: US12081943申请日: 2008-04-23
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公开(公告)号: US08361222B2公开(公告)日: 2013-01-29
- 发明人: Shiro Yamazaki , Seiji Nagai , Takayuki Sato , Katsuhiro Imai , Makoto Iwai , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura
- 申请人: Shiro Yamazaki , Seiji Nagai , Takayuki Sato , Katsuhiro Imai , Makoto Iwai , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura
- 申请人地址: JP Nishikasugai-Gun, Aichi-Ken JP Nagoya, Aichi-Pref
- 专利权人: Toyoda Gosei Co., Ltd.,NGK Insulators, Ltd.
- 当前专利权人: Toyoda Gosei Co., Ltd.,NGK Insulators, Ltd.
- 当前专利权人地址: JP Nishikasugai-Gun, Aichi-Ken JP Nagoya, Aichi-Pref
- 代理机构: McGinn IP Law Group, PLLC
- 优先权: JP2007-114663 20070424; JP2008-038980 20080220
- 主分类号: C30B15/14
- IPC分类号: C30B15/14 ; C30B15/00 ; C30B21/06 ; C30B27/02 ; C30B28/10 ; C30B30/04
摘要:
In the production of GaN through the flux method, deposition of miscellaneous crystals on the nitrogen-face of a GaN self-standing substrate and waste of raw materials are prevented. Four arrangements of crucibles and a GaN self-standing substrate are exemplified. In FIG. 1A, a nitrogen-face of a self-standing substrate comes into close contact with a sloped flat inner wall of a crucible. In FIG. 1B, a nitrogen-face of a self-standing substrate comes into close contact with a horizontally facing flat inner wall of a crucible, and the substrate is fixed by means of a jig. In FIG. 1C, a jig is provided on a flat bottom of a crucible, and two GaN self-standing substrates are fixed by means of the jig so that the nitrogen-faces of the substrates come into close contact with each other. In FIG. 1D, a jig is provided on a flat bottom of a crucible, and a GaN self-standing substrate is fixed on the jig so that the nitrogen-face of the substrate is covered with the jig. A flux mixture of molten gallium and sodium is charged into each crucible, and a GaN single crystal is grown on a gallium-face under pressurized nitrogen.
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