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发明授权
US08361878B2 Method for preparing cerium oxide, cerium oxide prepared therefrom and CMP slurry comprising the same 有权
制备氧化铈的方法，由其制备的氧化铈和包含该氧化铈的CMP浆料

Method for preparing cerium oxide, cerium oxide prepared therefrom and CMP slurry comprising the same
摘要：
The present invention relates to a method for preparing cerium oxide which enables preparation of cerium oxide showing improved polishing performance, cerium oxide prepared therefrom, and CMP slurry comprising the same.The method for preparing cerium oxide comprises the step of contacting cerium oxide with primary alcohol to increase specific surface area of the cerium oxide 10% or more.
摘要（中）：

本发明涉及一种能够制备显示改进的抛光性能的氧化铈的氧化铈的制备方法，由其制备的氧化铈和包含该氧化铈的CMP浆料。 制备氧化铈的方法包括使氧化铈与伯醇接触以使氧化铈的比表面积增加10％以上的步骤。

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